基于频域热反射法的薄膜热物性多参数测量系统的设计与开发
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天津大学精密测试技术及仪器全国重点实验室天津300072

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TH741

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国家自然科学基金委面上项目(52475566);国家自然科学基金委青年基金项目(62205241);天津市科技计划项目(24ZXZSSS00400)资助


Design and development of a multi-parameter measurement system for thin film thermophysical properties based on frequency-domain thermoreflectance
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State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China

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    摘要:

    频域热反射法(FDTR)以其高灵敏度、操作简单等优点成为薄膜热物性非接触式测量的重要方法,随着样品多样化和多参数测量需求增长,其测量系统集成化与可视化的重要性日益突出。传统频域热反射法热物性测量系统由于缺乏对误差和测量不确定度的量化分析,导致测量结果的可信度难以有效评估,重复性低。基于此,提出了新的系统设计方案:在基础测量模式基础上,引入多源噪声动态监测与抑制环节,实现对探测器噪声、激光噪声及信号传输噪声的实时分离。开发了基于频域热反射法的热物性多参数可视化分析系统,集成参数拟合、灵敏度分析、误差分析、不确定度分析功能,实现全流程操作。其中将误差分析与不确定度分析有效结合,不仅有助于识别与控制各类测量误差,还能够以标准化形式给出测量结果的可信度区间。实验数据证实,该系统具备热物性多参数测量能力与全参数蒙特卡罗模拟分析功能。对Al和Si两种标准薄膜材料的热物性测量结果显示,热导率等核心参数测量相对误差≤±2.38%,重复性≥98%,充分证明了系统可靠性与准确度。该系统通过抑制多源噪声干扰,并结合不确定度量化分析提升了热物性多参数测量系统的适应性,可在复杂薄膜体系下实现热物性的实时分析与精准测量。

    Abstract:

    Frequency-domain thermoreflectance (FDTR) has become an important non-contact method for measuring the thermophysical properties of thin films due to its high sensitivity. With the increasing demand for sample diversification and multi-parameter measurement, the integration and visualization of the measurement system are becoming increasingly important. Traditional FDTR systems lack quantitative analysis of errors and uncertainty, so it is difficult to effectively evaluate the reliability of measurement results. Based on this, a novel system design is proposed. A multi-source noise monitoring and suppression module is introduced to realize the real-time separation of detector noise, laser noise and signal transmission noise. A multi-parameter thermophysical property measurement and visualization system based on FDTR was developed. This system includes parameter fitting, sensitivity analysis, error analysis and uncertainty analysis. The effective combination of error analysis and uncertainty analysis can not only help control different kinds of measurement errors but also provide the confidence interval of measurement results. The system realizes multi-parameter thermophysical measurement and full-parameter Monte Carlo simulation analysis. Thermophysical properties of two standard thin-film materials, Al and Si, were measured. The relative error of key parameters such as thermal conductivity was ≤ ±2.38%, and the repeatability was ≥ 98%. By reducing multi-source noise interference and incorporating quantitative uncertainty analysis, the system enhances the performance of multi-parameter thermophysical measurement. It can realize real-time analysis and accurate measurement of thermo-physical properties in complex thin-film systems.

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徐保峥,谷佳奇,胡春光,李艳宁,沈万福.基于频域热反射法的薄膜热物性多参数测量系统的设计与开发[J].仪器仪表学报,2026,47(3):131-140

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  • 在线发布日期: 2026-05-22
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