Abstract:Frequency-domain thermoreflectance (FDTR) has become an important non-contact method for measuring the thermophysical properties of thin films due to its high sensitivity. With the increasing demand for sample diversification and multi-parameter measurement, the integration and visualization of the measurement system are becoming increasingly important. Traditional FDTR systems lack quantitative analysis of errors and uncertainty, so it is difficult to effectively evaluate the reliability of measurement results. Based on this, a novel system design is proposed. A multi-source noise monitoring and suppression module is introduced to realize the real-time separation of detector noise, laser noise and signal transmission noise. A multi-parameter thermophysical property measurement and visualization system based on FDTR was developed. This system includes parameter fitting, sensitivity analysis, error analysis and uncertainty analysis. The effective combination of error analysis and uncertainty analysis can not only help control different kinds of measurement errors but also provide the confidence interval of measurement results. The system realizes multi-parameter thermophysical measurement and full-parameter Monte Carlo simulation analysis. Thermophysical properties of two standard thin-film materials, Al and Si, were measured. The relative error of key parameters such as thermal conductivity was ≤ ±2.38%, and the repeatability was ≥ 98%. By reducing multi-source noise interference and incorporating quantitative uncertainty analysis, the system enhances the performance of multi-parameter thermophysical measurement. It can realize real-time analysis and accurate measurement of thermo-physical properties in complex thin-film systems.