超低膨胀石英玻璃热膨胀系数检测原理、方法及系统集成技术综述
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1.西南科技大学信息与控制工程学院绵阳621010; 2.苏州大学光电科学与工程学院苏州215006; 3.中国科学院光电技术研究所成都610209

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TH89TB321TB551

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基础加强计划技术领域基金(2024-JCJQ-JJ-0228)、四川省自然科学基金青年科学基金(2023NSFSC1391)项目资助


Review of principles, methods and system integration technology for measuring coefficient of thermal expansion in ultra-low expansion quartz glass
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1.School of Information and Control Engineering, Southwest University of Science and Technology, Mianyang 621010, China; 2.School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, China; 3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

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    摘要:

    超低膨胀石英玻璃(ULE)是一种通过精确掺杂TiO2实现热膨胀系数(CTE)在10-9/℃量级的特种材料,具有卓越的尺寸稳定性和温度适应性,广泛应用于天文观测、激光探测和半导体制造等领域。ULE材料制备过程中,TiO2分布均匀性影响CTE分布的均匀性,进而对ULE光学元件的光学面形和成像质量稳定性产生重要影响,因此保证ULE材料全口径的CTE均匀性成为材料制备技术研究重点,其中CTE及其均匀性的高精度测量将为材料制备工艺高效迭代优化提供有力支撑。系统综述了ULE的制备工艺及其CTE调控机制,重点分析了CTE及其均匀性的检测技术研究进展并对比了各技术优缺点:传统取样标定法(如顶杆法、干涉法和光弹法)虽能实现高精度测量,但存在破坏性、操作复杂等局限性;而无损检测法(如折射率法、线聚焦超声扫描法和超声纵波声速法)则为ULE材料全口径CTE评估提供了有效解决方案,尤其超声纵波声速法,因其能够实现大尺寸ULE坨料CTE及其均匀性的高效表征,并在测量精度与工程实用性之间取得了良好平衡。进一步探讨了超声无损检测技术的关键挑战与发展前景,提出未来需突破微观特性对声波传输的影响机理、高精度声速测量等难题,以推动大尺寸、高性能ULE材料的制备与应用。从多学科交叉视角构建了ULE热膨胀系数检测技术体系,为相关研究提供了新思路和技术参考。

    Abstract:

    Ultra-low expansion quartz glass (ULE) is a special material with a coefficient of thermal expansion (CTE) of 10-9/℃, achieved through precise TiO2 doping. It boasts excellent dimensional stability and temperature adaptability, making it widely used in astronomical observations, laser detection, and semiconductor manufacturing. During the preparation of ULE materials, the uniformity of TiO2 distribution affects the uniformity of CTE distribution, which in turn significantly influences the optical surface figure and the stability of imaging quality of ULE optical components. Therefore, ensuring full-bore CTE homogeneity in ULE materials has become a key focus in material preparation technology research, among which highprecision measurement of CTE and its uniformity provides strong support for efficient iterative optimization of the material preparation process. This paper provides a comprehensive review of the preparation methods of ULE and its CTE control mechanisms, focuses on analyzing the research progress on detection technology of CTE and its uniformity, and compares the advantages and disadvantages of each technology: Traditional sampling calibration methods, such as the pushing-rod method, interferometry, and photoelasticity, can achieve high-precision measurements but have limitations such as destructiveness and complex operation; while nondestructive testing methods (such as the refractive index method, the linear focused ultrasonic scanning method and the ultrasonic longitudinal wave velocity method) provide effective solutions for full-bore CTE evaluation of ULE materials. In particular, the ultrasonic longitudinal wave velocity method can effectively characterize CTE and its uniformity in large ULE boules, and achieve a good balance between measurement accuracy and engineering practicability. The paper further explores the key challenges and future prospects of ultrasonic nondestructive testing technology, proposing that future efforts should address the impact of microscopic characteristics on sound wave transmission and the challenge of achieving high-precision sound wave velocity measurements to advance the preparation and application of large-size, high-performance ULE materials. This review constructs a multi-disciplinary perspective on the detection technology system for coefficient of thermal expansion in ULE, providing new ideas and technical references for related research.

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魏文卿,唐子圣,邓琥,张永峰,刘红.超低膨胀石英玻璃热膨胀系数检测原理、方法及系统集成技术综述[J].仪器仪表学报,2025,46(12):134-153

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  • 在线发布日期: 2026-03-02
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