二次耦合的绝对式直线时栅位移传感器
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1.重庆理工大学机械工程学院重庆400054; 2.重庆铁马工业集团有限公司重庆400050; 3.重庆理工大学电气与电子工程学院重庆400054

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TH712

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国家自然科学基金项目(52175454)、重庆市自然科学基金面上项目(CSTB2023NSCQ-MSX0382)、重庆市教委科学技术研究计划重点项目(KJZD-K202301106)资助


Absolute linear time-grating displacement sensor based on secondary coupling
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1.School of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China; 2.Chongqing Tiema Industrial Group Co, Ltd, Chongqing 400050, China; 3.School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing 400054, China) Abstract:In response to the demand for precision linear displacement measurement in fi

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    摘要:

    针对精密制造、航空航天工业及军事应用等领域对精密直线绝对位移测量的需求,提出了一种二次耦合的绝对式直线时栅位移传感器,其定尺采用离散分布式无源设计,避免了传统设计中定尺线圈层间连接过孔带来的分布电感与分布电容,提高了感应磁场的连续性与均匀性;激励信号与感应信号的处理集中于动尺侧,只需在动尺侧布置引线,磁场的耦合限制在激励线圈范围内,从而有效抑制传感器定尺上未被基体覆盖的线圈与环境中各种电磁波耦合带来的高次谐波干扰,同时拓宽了传感器的应用领域。首先,建立平面瞬态磁场耦合模型,构建双列绝对式传感器测量模型及其传感机理,采用对极数互质的绝对位移解算方案,扩大了绝对位移测量中误差允许范围,提高了绝对位移解算的准确性;并提出了一种同频调制的信号解耦方法,通过优化信号处理机制,在实现传感器高信噪比的同时,显著降低传感器对ADC采样率的要求,解决了ADC采样率与分辨率之间的矛盾;通过电磁场有限元仿真,对传感器进行了理论验证和误差分析,确定了传感器优化安装间隙为0.5 mm。最后,采用PCB工艺制作传感器样机并开展相关实验研究,实验结果表明,传感器在203 mm的有效测量范围内能够实现绝对位移测量,其原始测量误差为-12.62~+3.23 μm。

    Abstract:

    In response to the demand for precision linear displacement measurement in fields such as precision manufacturing, aerospace industry, and military applications, an absolute linear time-grating displacement sensor based on secondary coupling is proposed. The fixed scale employs a discretely distributed passive design, which avoids the distributed inductance and capacitance caused by interlayer connection through-holes in traditional designs, thereby improving the continuity and uniformity of the induced magnetic field. Both excitation and sensing signal processing are concentrated on the slider side, requiring only the arrangement of leads on the slider side, with magnetic coupling confined to the excitation coil area. This design effectively suppresses interference from electromagnetic coupling between uncovered coils on the stator and ambient electromagnetic waves, while expanding the sensor′s application scope. First, a planar transient magnetic field coupling model is established, and a dual-array absolute sensor measurement model with its sensing mechanism is constructed. By using a coprime pole-number absolute displacement calculation scheme, the allowable error range in absolute displacement measurement is expanded, and the accuracy of absolute displacement calculation is improved. Additionally, a novel same-frequency modulation signal decoupling method is proposed, which achieves a high signal-to-noise ratio while significantly reducing ADC sampling rate requirements by optimizing the signal processing mechanism, thus resolving the contradiction between ADC sampling rate and resolution. Through electromagnetic finite element simulation, theoretical verification and error analysis of the sensor are conducted, determining the optimal installation gap to be 0.5 mm. Finally, sensor prototypes are fabricated using PCB technology, and experimental studies are performed. The experimental results show that the proposed sensor can achieve absolute displacement measurement within a range of 203 mm, with original measurement errors ranging from -12.62 to +3.23 μm.

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杨继森,易靖松,秦小东,曹峻杰,张静.二次耦合的绝对式直线时栅位移传感器[J].仪器仪表学报,2025,46(9):267-278

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  • 在线发布日期: 2025-12-22
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