半球谐振陀螺高精度质量平衡研究
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华中光电技术研究所武汉光电国家研究中心武汉430223

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TH89

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Research on high-precision mass balance of hemispherical resonant gyroscope
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Huazhong Institute of Electro-Opics Wuhan National Laboratory for Optoelectronics, Wuhan 430223, China

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    摘要:

    质量不平衡是半球谐振子制造及组件装配过程中产生的非对称性缺陷,由材料各向异性、加工误差及装配偏差等工艺环节引入的非对称特性会引发谐振子非理想振动模式,导致四波腹驻波畸变,加剧哥氏效应耦合误差,进而恶化半球谐振陀螺的输出特性,影响其导航精度。针对这一制约高精度半球谐振陀螺发展及批量化生产的关键技术,提出了基于谐振子驻波虚拟旋转状态参数解调与支撑杆振动检测相结合的辨识方法,通过激光测振仪精确捕捉谐振子振动特征,实现了不平衡质量的辨识。系统分析了谐振子精密成型、金属化镀膜及精密装调等工艺环节对谐振子质量分布的差异化影响,揭示了不同工艺误差与振动模态耦合的关联规律,据此制定了阶梯式质量平衡策略。基于上述理论分析,研制了集成了谐振子驻波控制、振动测量与微去除技术的自动化平衡装置,在此基础上完成了谐振子的质量平衡。谐振子质量平衡后结果表明:对于4次谐波,实现了频率裂解为0.056 mHz的平衡精度;对于1~3次谐波,4次谐波振幅为0.15 μm时,1~3次谐波引起的耦合振动<0.03 nm,得到了良好的结果,验证了平衡方法及工艺的正确性,为研制及批产化高精度半球谐振陀螺仪提供了有力工艺支撑。

    Abstract:

    Mass imbalance in hemispherical resonators—caused by asymmetric defects introduced during manufacturing and assembly processes such as material anisotropy, machining inaccuracies, and assembly misalignments—leads to non-ideal vibration modes. These imperfections result in quadrant-wave standing wave distortion, intensify Coriolis effect coupling errors, and ultimately degrade the output performance and navigation accuracy of hemispherical resonator gyroscopes (HRGs). To tackle this key challenge limiting the development and large-scale production of high-precision HRGs, this study introduces an identification method that combines virtual rotation state parameter demodulation of standing waves with support-beam vibration detection. Laser vibrometry is employed to precisely capture the resonator’s vibration characteristics, enabling quantitative characterization of mass imbalance. A systematic investigation reveals how precision forming, metallization coating, and high-accuracy assembly each impact the mass distribution, highlighting the correlation between process-induced errors and vibration mode coupling. Based on these insights, a hierarchical balancing strategy is proposed. To implement it, an automated balancing system is developed, integrating standing wave control, vibration measurement, and micro-material removal technologies. Experimental validation shows that after balancing, the 4th harmonic frequency split is reduced to 0.056 mHz, and the coupling vibration amplitudes of the 1st-3rd harmonics are kept below 0.03 nm, given a 4th harmonic amplitude of 0.15 μm. These results verify the effectiveness and precision of the proposed balancing method, offering strong technical support for the advancement and mass production of high-precision HRGs

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王鹏,车驰骋,曲天良,刘天怡,张熙.半球谐振陀螺高精度质量平衡研究[J].仪器仪表学报,2025,46(9):52-60

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  • 在线发布日期: 2025-12-22
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