基于光纤多普勒效应的微半球谐振子测振方法研究
DOI:
CSTR:
作者:
作者单位:

国防科技大学智能科学学院长沙410073

作者简介:

通讯作者:

中图分类号:

TH703

基金项目:

国家自然科学基金(52075540)、国家资助博士后研究人员计划(GZC20252812)项目资助


Research on the vibration measurement method of micro-hemispherical resonator based on fiber optic Doppler effect
Author:
Affiliation:

College of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    熔融石英微半球谐振子是微半球陀螺核心结构,其中未镀膜透明谐振子的振动测试对陀螺工艺优化与性能保障至关重要。传统测振技术存在局限:电容检测法受限于表面镀膜工艺要求,无法适用透明谐振子;商用台式激光测振仪虽能实现非接触检测,但体积大、成本高,难以满足集成需求。在此背景下依托光纤多普勒效应提出测振新方法,构建了微型化光纤测振系统。1 550 nm单模光纤激光器作为系统光源,其输出光束经光纤耦合器分为本振光与信号光。信号光定向传输至振动谐振子表面,反射后与声光移频器调制的本振光合束产生外差信号。信号处理模块通过光电探测器把外差光信号转成电信号,再用反正切算法解调,提取谐振子振动参数。系统采用六自由度夹具实现光纤与谐振子的空间对准。实验在70~80 Pa真空环境中开展,结果表明谐振子响应振幅与激励电压成正比,其测量相对误差<1%。测振系统在0~9 000 Hz范围可精准辨识前三阶模态,与商用Polytec MSA-600测振仪结果一致,且能检测出工作模态39 Hz的频率裂解和四波腹振型分布。该光纤测振系统实现了亚纳米级测量,适配未镀膜谐振子,兼具体积紧凑和成本低的优势,为微半球陀螺谐振子检测及工艺优化提供可靠方案。

    Abstract:

    The fused silica micro hemispherical resonator is the core structure of the micro hemispherical gyroscope, and the vibration testing of the uncoated transparent resonator is crucial for optimizing the gyroscope process and ensuring its performance. The traditional vibration measurement technology has limitations. The capacitance detection method is restricted by the requirements of surface coating processes and cannot be applied to transparent resonators. Although commercial benchtop laser vibrometers are capable of non-contact measurements, their large volume, high cost, and limited suitability for integration make them challenging to meet the demands of compact system designs. Therefore, this article proposes a new method of vibration measurement based on the fiber Doppler effect and constructs a miniaturized fiber vibration measurement system. The 1 550 nm single-mode fiber laser is employed as the system light source, with its output beam split into local oscillator and signal light via a fiber coupler. The signal light is directed onto the surface of the vibrational resonator, where it is reflected and then combined with the local oscillator beam, which has been frequency-shifted by an acousto-optic modulator, to generate a heterodyne signal. The signal processing module converts the heterodyne optical signal into an electrical signal using a photodetector and then demodulates it using an arctangent algorithm to extract the resonator′s vibration parameters. The system utilizes a six-degree-of-freedom fixture to ensure spatial alignment between the optical fiber and the resonator. The experiments are conducted in a vacuum environment of 70~80 Pa, and the results show that the resonator′s response amplitude is directly proportional to the excitation voltage, with a relative measurement error of less than 1%. The vibrometry system is capable of accurately identifying the first three modal frequencies within the range of 0~9 000 Hz, yielding results consistent with those obtained from the commercial Polytec MSA-600 vibrometer. Additionally, the system is able to detect frequency splitting at the operational mode of 3.9 Hz and the distribution of the four-wave vibration pattern. This fiber optic vibrometry system achieves sub-nanometer level measurements. It is compatible with uncoated resonators, which offers the advantages of compact size and low cost. It provides a reliable solution for micro-hemisphere gyroscope resonator testing and process optimization.

    参考文献
    相似文献
    引证文献
引用本文

夏雨,赵威,曾凯,吴宇列,席翔.基于光纤多普勒效应的微半球谐振子测振方法研究[J].仪器仪表学报,2025,46(9):24-31

复制
分享
相关视频

文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2025-12-22
  • 出版日期:
文章二维码