Abstract:The fused silica micro hemispherical resonator is the core structure of the micro hemispherical gyroscope, and the vibration testing of the uncoated transparent resonator is crucial for optimizing the gyroscope process and ensuring its performance. The traditional vibration measurement technology has limitations. The capacitance detection method is restricted by the requirements of surface coating processes and cannot be applied to transparent resonators. Although commercial benchtop laser vibrometers are capable of non-contact measurements, their large volume, high cost, and limited suitability for integration make them challenging to meet the demands of compact system designs. Therefore, this article proposes a new method of vibration measurement based on the fiber Doppler effect and constructs a miniaturized fiber vibration measurement system. The 1 550 nm single-mode fiber laser is employed as the system light source, with its output beam split into local oscillator and signal light via a fiber coupler. The signal light is directed onto the surface of the vibrational resonator, where it is reflected and then combined with the local oscillator beam, which has been frequency-shifted by an acousto-optic modulator, to generate a heterodyne signal. The signal processing module converts the heterodyne optical signal into an electrical signal using a photodetector and then demodulates it using an arctangent algorithm to extract the resonator′s vibration parameters. The system utilizes a six-degree-of-freedom fixture to ensure spatial alignment between the optical fiber and the resonator. The experiments are conducted in a vacuum environment of 70~80 Pa, and the results show that the resonator′s response amplitude is directly proportional to the excitation voltage, with a relative measurement error of less than 1%. The vibrometry system is capable of accurately identifying the first three modal frequencies within the range of 0~9 000 Hz, yielding results consistent with those obtained from the commercial Polytec MSA-600 vibrometer. Additionally, the system is able to detect frequency splitting at the operational mode of 3.9 Hz and the distribution of the four-wave vibration pattern. This fiber optic vibrometry system achieves sub-nanometer level measurements. It is compatible with uncoated resonators, which offers the advantages of compact size and low cost. It provides a reliable solution for micro-hemisphere gyroscope resonator testing and process optimization.