In order to solve the problem of large inclination error of Piezoresistive micro differential pressure sensor at different attitude positions, this paper designs four range micro differential pressure sensors that meet the sensitivity requirements. The results show that the single island membrane structure forms a stress concentration at the edge of the silicon island, and the double island membrane structure forms a stress concentration at the center between the two islands, both cases help to improve sensitivity. The influence on inclination error is reduced through single isolation diaphragm and micro oil filled package design. The results show that the zero point output of sensor is approximately linearly related to the inclination angle, and the smaller the differential pressure range is, the greater the inclination error is, and the inclination error at 2 kPa shall not exceed 094%. This study provides a basis for the design of micro differential pressure sensor and the analysis of its inclination error.