Analyzed the low power factor and the voltage fluctuation of a monocrystalline silicon production workshop distribution network, and compared two mixed compensation solutions, this paper proposed a method using Static Var Generator (SVG) for capacitor switching device’s correct compensation. Used MATLAB/Sinmulink simulation software to set up mixed compensation system model and have simulation verification, while designed a SVG device to be applied in the monocrystalline silicon production workshop. The simulation and experimental results show that the grid power factor can be improved to more than 0.99, the design of Static Var Generator can improve the power factor of monocrystalline silicon production workshop effectively, and it also has good dynamic performance.