MEMS环形谐振陀螺驱动模态控制方法研究
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1.内蒙古工业大学电力学院 呼和浩特 010080;2.内蒙古工业大学内蒙古自治区机电控制重点实验室 呼和浩特 010080

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TN06;TP212

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内蒙古自治区自然科学基金(2024LHMS06023)项目资助


Study on control methods for driving mode of MEMS vibrating ring gyroscope
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1.College of Electric Power, Inner Mongolia University of Technology,Hohhot 010080, China;2.Inner Mongolia Key Laboratory of Electromechanical Control, Inner Mongolia University of Technology,Hohhot 010080, China

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    摘要:

    为了有效控制微机电环形谐振陀螺驱动模态的工作状态,提高驱动幅值的稳定性能与谐振频率的实时跟踪性能,本文提出了一种基于相位控制与自动增益控制的驱动模态闭环控制方案。首先,基于环形谐振陀螺的动力学特性与机电接口特点,设计了对称静电驱动-差动电容敏感的机电接口,提出了基于相位控制与自动增益控制的闭环驱动控制方案;其次,构建了闭环驱动控制方案的机电耦合仿真模型,对驱动模态的自激振荡控制、幅值稳定性与频率跟踪状态进行了仿真,验证了系统的动态性能。最后,基于上述方案设计了驱动模态闭环控制电路,实验测试了电路性能。实验结果表明,该电路的驱动激励信号频率能够很好的跟踪陀螺驱动模态谐振频率的变化;在-40℃~60℃温度环境内变化时,驱动检测电压变化范围低于5.08%,幅值随温度的相对变化率小于0.059%,符合全温区稳幅驱动的要求。

    Abstract:

    A closed-loop control scheme for the driving mode of a vibrating ring gyroscope based on phase control and automatic gain control is proposed, which is to better control the working state of the gyroscope driving mode, thereby improving the stability of the driving amplitude and the real-time tracking ability of the resonant frequency. First, based on the dynamic characteristics of the vibrating ring gyroscope and the electromechanical interface features, an electromechanical interface with symmetric electrostatic driving and differential capacitive sensing was designed. On this basis, a closed-loop drive control scheme based on phase control and automatic gain control was proposed. Furthermore, an electromechanical coupling simulation model of the closed-loop drive control was constructed. The self-excited oscillation control of the drive mode, amplitude stability, and frequency tracking state were simulated, validating the dynamic performance of the system. Finally, a closed-loop control circuit for the driving mode was designed based on the proposed scheme, and the performance of the circuit was tested. The experimental results show that the driving signal frequency of this circuit can effectively track the variations in the resonant frequency of the gyroscope′s driving mode. When the temperature varies within the range of -40℃ to 60℃, the variation range of the drive detection voltage is less than 5.08%, and the relative change in amplitude with temperature is less than 0.059%, which meets the requirements for stable amplitude drive over the full temperature range.

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寇志伟,崔啸鸣,尹煜,李娜,齐咏生. MEMS环形谐振陀螺驱动模态控制方法研究[J].电子测量技术,2025,48(12):42-48

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