用于宽温度范围摆镜控制的电容角位移传感器
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北京信息科技大学仪器科学与光电工程学院 北京 100192

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TP212;TN721

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安徽省科技攻坚计划项目(202423k09020019)资助


Capacitive angular displacement transducer for wide temperature range swing mirror control
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School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China

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    摘要:

    为了实现摆镜系统在宽温度范围内的稳定控制,研究电容角位移传感器的温度漂移抑制方法。采用高频复合陶瓷材料作为传感器介质,并通过对称式差分测量电路及自动增益控制电路的温漂抑制措施,降低温度变化对传感器输出信号的干扰。对传感器在-40℃~+60℃的温度范围内输出电压和偏转角度进行测试,实验结果表明,改进后的电容角位移传感器在宽温度范围内输出电压的最大温漂为0.87 V,最大角度漂移为0.63′,温度漂移为11.67 ppm/℃,其性能显著优于传统电容式传感器,所采用的温漂抑制措施可有效降低温度变化对摆镜控制精度的影响,适用于宽温度范围内的高精度摆镜系统。

    Abstract:

    In order to achieve stable control of the swing mirror system over a wide temperature range, a design and optimization method based on capacitive angular displacement transducer is proposed. By analyzing the transfer function of the swing mirror system and the temperature characteristics of the capacitive angular displacement transducer, high-frequency composite ceramic materials are used as the sensor medium, and temperature drift suppression measures are taken through symmetrical differential measurement circuits and automatic gain control circuits to reduce the impact of temperature changes on the sensor output signal. Build an experimental platform to test the output voltage and deflection angle of the sensor within the temperature range of -40 ℃ to+60 ℃. The results show that the improved capacitive angular displacement sensor has a maximum temperature drift of 0.87 V, a maximum angle drift of 0.63′, and a temperature drift of 11.67 ppm/℃ in a wide temperature range, which is significantly better than the performance of traditional capacitive sensors. The temperature drift suppression measures adopted can effectively reduce the impact of temperature changes on the control accuracy of the swing mirror, and are suitable for high-precision swing mirror systems in a wide temperature range.

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查伟,杨明庆,陈青山,王艳林.用于宽温度范围摆镜控制的电容角位移传感器[J].电子测量技术,2025,48(11):140-146

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  • 在线发布日期: 2025-07-07
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