芯片贴装几何参数高精度测量方法
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北京信息科技大学现代测控技术教育部重点实验室 北京 100192

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TH391;TN407

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机电测控系统北京市重点实验室开放课题(KF20202223204)项目资助


High-precision measurement method for chip mounting geometric parameters
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Key Laboratory of Modern Measurement and Control Ministry of Education,Beijing Information Science and Technology University,Beijing 100192, China

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    摘要:

    针对芯片贴装过程中的偏移检测、质心定位和尺寸测量精度问题,提出了一种基于机器视觉的高精度测量方法。该方法对CMOS相机获取的贴片元件图像进行灰度化、混合滤波及阈值分割等预处理,结合改进的Canny算子与Franklin矩亚像素算法,实现图像中亚像素级边缘的精确定位;然后根据元件图像的偏移角度,采用两种策略进行边缘分割,以满足不同测量场景的需求;最后通过结合最小二乘法和RANSAC算法,实现对轮廓直线的拟合,获取精确的轮廓直线和交点坐标。实验结果表明,该方法角度检测误差小于0.05°,质心定位误差小于0.6像素,尺寸测量误差小于±0.008 mm,相对误差小于±0.1%,平均处理时间为2.039 s比Canny-Zernike矩算法缩短约21%。该方法具备自动化程度高、测量速度快并达到微米级测量精度,适用于工业实时检测芯片贴装过程。

    Abstract:

    A high-precision measurement method based on machine vision was proposed to address the accuracy issues in offset detection, centroid positioning, and dimension measurement during chip placement. The method involves preprocessing the patch component images captured by a CMOS camera with grayscale conversion, hybrid filtering, and threshold segmentation. Sub-pixel edge detection was achieved using an improved Canny operator and Franklin moment algorithm. Depending on the offset angle of the component image, two edge segmentation strategies were employed to suit different measurement scenarios. The least squares method and RANSAC algorithm were then used to fit contour lines and obtain accurate contour line and intersection coordinates. Experimental results show that the method achieves an angle detection error of less than 0.05°, a centroid positioning error of less than 0.6 pixels, and a dimension measurement error within ±0.008 mm, with a relative error of less than ±0.1%. The processing time is approximately 21% shorter than that of the Canny-Zernike moment algorithm. The method offers high automation, fast measurement speed, and micron-level precision, making it suitable for real-time industrial chip placement detection.

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黄佳伟,谷玉海,张英.芯片贴装几何参数高精度测量方法[J].电子测量技术,2025,48(11):33-41

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  • 在线发布日期: 2025-07-07
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