In order to reduce the impact of external vibrations and shocks on the output accuracy of the micro inertial measurement unit (MIMU), combining the requirements of MEMS sensor support and multi-degree-of-freedom vibration reduction theory, a suitable damper placement method was selected and a MIMU rubber vibration damping system was designed. The MIMU structure has the characteristics of light weight and small volume, and has sufficient rigidity to ensure the stability of the structure, and the setting of the rubber shock absorber effectively reduces the vibration coupling. In order to accurately describe the rubber properties, the Mooney-Rivlion constitutive model is used to simulate the rubber material, and the parameters of the vibration-damping rubber material are determined according to the empirical formula. The actual shape finite element model of the vibration reduction system was established, and the dynamic characteristics analysis was carried out. It is obtained that the first 10 natural frequencies of the system were far away from the external excitation. Considering the large deformation of rubber, the deformation Angle of the circuit board in the vibration damping system is taken as the evaluation criterion in the transient response analysis. The results show that the deformation Angle of the circuit board is 0.06°, which meets the design standard, and has a good vibration reduction effect compared with the MIMU without vibration reduction.