多晶硅红外探测器在工业加热炉上的应用研究
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1合肥师范学院物理与材料工程学院,合肥,230601 2安徽省光电感测工程技术研究中心,安徽 合肥 230601

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:TN215

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安徽省高校自然科学研究重点项目(KJ2020A0125)


Application of polysilicon infrared detector in industrial heating furnace
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1, The School of physics and materials engineering of Hefei Normal University, Hefei 230601 China; 2The Research Center of Photoelectric Sensing Engineering Technology of Anhui Province, Hefei 230601 China

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    摘要:

    工业加热炉中,受高温环境的影响一般探测器无法测量工件的真实温度。针对工业加热炉温度检测问题,设计了多晶硅红外探测器实时测温系统。通过黑体炉对探测器的输出与环境温度的关系、以及光电转换性能进行测试;结果为工作环境温度超过30℃时输出急剧减小,且随着目标温度升高,动态范围减小。设计在探测器前端增加衰减片和一种具有夹层结构的防护罩,结果表明该系统有效拓展了多晶硅红外探测器的动态范围,保障探测器的环境温度在30℃范围内,测量精度达到0.85℃,满足工业要求,解决了多晶硅红外探测器在工业加热炉上的应用。

    Abstract:

    In the industrial heating furnace,due to the influence of high temperature environment, the general detector cannot measure the real temperature of the workpiece .Aiming at the temperature detection of industrial heating furnace, a real-time temperature measurement system of polysilicon infrared detector is designed. The relationship between the detector output and the ambient temperature, as well as the photoelectric conversion performance were tested by blackbody furnace, the results show that the output decreases sharply when the working environment temperature exceeds 30℃, with the increase of target temperature, the dynamic range decreases. The design adds an attenuator in front of the detector and a protective cover with sandwich structure, the results show that the system effectively expands the dynamic range of the polysilicon infrared detector and ensures that the ambient temperature of the detector is within 30 ℃, The measurement accuracy reaches 0.85 ℃, which meets the industrial requirements, and solves the application of polysilicon infrared detector in industrial heating furnace.

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刘纯红,熊丹枫,余龙宝,吴海滨.多晶硅红外探测器在工业加热炉上的应用研究[J].电子测量技术,2021,44(6):54-58

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  • 在线发布日期: 2024-10-18
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